STANDARD PLASMA SYSTEMS

[ RF-GENERATORS ]

RF generator 13.56 MHz, 100 W

Rated RF power output: 100 Watts Frequency: 13.560 MHz ± 100ppm Adjustable RF power range :    0 - 100 Watts, continous Generator can be pulsed:    Min. on-time: 5µs Impedance: 50 Ohms RF stability: less than 5 %    (depends on the adjusting device) Load missmatch protection (built-in)    against open output and short circuit Regulation tolerance load:     VSWR = 1.2 Capable of switching power to 100 %    immediately Mains input : 88 - 264 VAC / 47 - 63    Hz (when combined with external    power supply ) Mains power consumption:    max. 220 Watts Remote interface connector intended    for :     - RF switch ON/OFF     - RF power adjustment      (0...10V = 0...100%) RF output: N connector Power connector : for external    power supply Weight: approx. 6.5 kg (generator)    plus 1.0 kg (power supply)

RF generator 100

RF generator 13.56 MHz, 300 W

Rated RF power output: 300 Watts Frequency: 13.560 MHz ± 100ppm Adjustable RF power range :    0 - 300 Watts, continous Generator can be pulsed:    Min. on-time: 5µs Impedance: 50 Ohms RF stability: less than 5 %    (depends on the adjusting device) Load missmatch protection (built-in)    against open output and short circuit Regulation tolerance load:     VSWR = 1.2 Capable of switching power to 100 %    immediately Mains input : 88 - 264 VAC / 47 - 63    Hz (when combined with external    power supply ) Mains power consumption:    max. 580 Watts Remote interface connector intended    for :     - RF switch ON/OFF     - RF power adjustment      (0...10V = 0...100%) RF output: N connector Power connector : for external    power supply Weight: approx. 18 kg (generator) 19-inch rack

RF generator 300