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PLASMAANLAGEN - LOW COST PLASMA SYSTEM ZEPTO

[PLASMA CLEANER - PLASMA ETCHER - PLASMA ASHER -PLASMA ACTIVATION]

2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:

small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology

Give us a call! We´d be happy to discuss more details. Tel.: +49 (0) 7458 - 999 31 - 0

Brochure ZEPTO (PDF 1034 KB)

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC

Gas supply

- Nadelventile
- Mass-Flow-Controller (MFCs)

Vacuum chambers

-Quartzglass (UHP)
    round with cover
    (approx. Ø 105 mm, L 200 mm or L 300 mm)

- Borosilicate glass (UHP)
    round with cover
    (approx. Ø 95 mm, L 200 mm or L 300 mm)

Loading with

- flat tray Aluminium, flat tray stainless steel,
flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode

Control

- Manually
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPe)

Timer

- Digital

Generator

Frequencies: 40 kHz: Power 0 - 30 W; 0 - 100 W
13,56 MHz: Power 0 - 50 W

Vacuum pump

- in different sizes from different manufacturers
(As required with active carbon filter)